3D LASER ABLATION TOMOGRAPHY AND SPECTROGRAPHIC ANALYSIS

Abstract

A laser ablation tomography system includes a specimen stage for supporting a specimen. A specimen axis is defined such that a specimen disposed generally on the axis may be imaged. A laser system is operable to produce a laser sheet in a plane intersecting the specimen axis and generally perpendicular thereto. An imaging system is operable to image the area where the laser sheet intersects the specimen axis.

Publication
U.S. Patent 20,150,323,431
Date
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